Model of an EUV wafer stepper, which uses nanometer multilayer coating systems for the reflection of the radiation

Nanofair 2010 will provide a forum for presenting current
research and for the exchange of ideas and information between researchers, scientists and engineers from industry, research laboratories and academia. Contributions will cover fundamental scientific aspects as well as application oriented research and development. Furthermore successful implementations of new products using nanotechnology will be addressed as well.

Special emphasis will be given to all kind of material aspects.
Therefore, Nanofair 2010 will focus on the following topics

• functional nanocomposites
• nanostructured surfaces
• nanomaterials for life sciences
• nanomaterials for energy applications
• nanoelectronics & photonics
• processing aspects of nanomaterials
• nanoanalytical methods